High-Purity Chemical Sampling Vials
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High-Purity Chemical Sampling Vials
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The Precursor Source Bottle Manufacturing Facility specializes in the R&D and production of packaging containers for liquid and solid precursors utilized in CVD/ALD (Chemical Vapor Deposition/Atomic Layer Deposition) process flows. The facility operates Class 1000, Class 10,000, and Class 100,000 cleanrooms (ISO Class 6/7/8), enforcing rigorous environmental controls to ensure all products meet stringent semiconductor-grade specifications. Equipped with globally advanced machinery—including laser cutting, CNC precision machining, automated orbital welding, micro-orbital welding for process tubing, automatic electropolishing, and high-precision metrology—the company ensures superior manufacturing accuracy.
Adopting advanced surface treatment technologies from Japan, the facility guarantees that the inner surface electropolishing and precision cleaning of source bottles achieve industry-leading standards for semiconductor applications, earning widespread recognition from domestic and international clients. The company has successfully developed, prototyped, and mass-produced a diverse portfolio of sampling and storage containers. These products are extensively deployed in the semiconductor, LCD, PV (Photovoltaic), and LED sectors, fully satisfying the rigorous high-quality demands of the advanced manufacturing industry.
Detailed Specifications：
material Valve: 316L EPBottle Body: 316L (Alternative materials: Titanium, Hastelloy®) with internal Electropolishing (EP). Surface roughness Ra ≤ 0.15 μm Compatible Chemical Purity ≤99.9999999%（9N） Helium Leak Detection Leak Rate:≤1.0X10-10mbar.L/S Process Media Solid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds Final Inspection Items Pressure Resistance, Helium Leak Tightness, Moisture Content, Oxygen Content, Particle Count, Surface Roughness (Ra), Metallic Ion Extractables Available Manufacturing
CertificationsUN Pressure Vessels and ASME UM / U Stamp Certifications Capacity & Dimensions We supply containers in over 200 standard sizes, ranging from 25 mL to 26 m³. Optional Configurations Connection Type, Number of Valves, and Output & Purge Processes
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