Medium to large electronic chemical containers
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  • Medium to large electronic chemical containers

Medium to large electronic chemical containers

Specifications:​ 500 L, 900 L, 1,000 L, 2,600 L, 26,000 L, etc. Filled Precursors:​ TEOS, HCDS, BDEAS, etc.

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400-928-0585

Keywords:

Medium to large electronic chemical containers

  • Product Details
  • The source bottle factory mainly researches and produces packaging containers for various types of liquid precursors and solid precursors in the CVD/ALD process. The factory is equipped with cleanrooms of Class 1000, Class 10000, and Class 100000, strictly controlling the cleanliness of the production environment to ensure that the products ultimately meet semiconductor requirements. The company has also purchased advanced domestic and foreign equipment such as laser cutting, CNC precision machining, automatic equipment welding, pipeline micro welding, automatic polishing, and precision testing.

    The company has introduced Japanese surface treatment technology to ensure that the electrochemical polishing and precision cleaning of the inner surface of the source bottle reach the advanced level of semiconductors, and has gained high recognition from domestic and foreign customers. We have developed, trial produced, and mass-produced various types of sampling and storage containers for our customers, which are widely used in fields such as semiconductors, liquid crystals, photovoltaics, and LEDs, fully meeting the high-quality requirements of the industry.

     

    The source bottle factory mainly researches and produces various types of liquid precursors and detailed parameters for solid-state precursor in CVD/ALD process

    materialValve:​ 316L EPBottle Body:​ 316L (Alternative materials: Titanium, Hastelloy®) with internal Electropolishing (EP). Surface roughness Ra ≤ 0.15 μm.
    Compatible Chemical Purity≤99.9999999%(9N)
    Helium Leak DetectionLeak Rate≤1.0X10-10mbar.L/S
    Process MediaSolid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds
    Final Inspection ItemsSolid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds
    Available Manufacturing CertificationsSolid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds
    Capacity & DimensionsSolid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds
    Optional ConfigurationsSolid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds

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