Solid Precursor Material Source Bottle
Are you still hesitating? You can contact our product experts first!
400-928-0585
Category
Keywords:
Solid Precursor Material Source Bottle
- Product Details
-
The Precursor Source Bottle Manufacturing Facility specializes in the R&D and production of packaging containers for all types of liquid and solid precursors used in CVD/ALD (Chemical Vapor Deposition/Atomic Layer Deposition) process flows. The facility is equipped with Class 1000, Class 10,000, and Class 100,000 cleanrooms (equivalent to ISO Class 6, 7, and 8 under ISO 14644-1 standards), with rigorous control over production environment cleanliness to ensure all products meet semiconductor-grade specifications. It is also outfitted with domestically and internationally advanced equipment for laser cutting, CNC precision machining, automated welding, micro-orbital welding for process tubing, automatic polishing, and precision metrology.
The company has adopted advanced surface treatment processes from Japan to ensure that the electropolishing and precision cleaning of the inner surfaces of precursor source bottles meet industry-leading standards for semiconductor applications, which has earned widespread recognition from both domestic and international customers. It has developed, prototyped, and volume-supplied a wide range of sampling and storage containers for clients, which are widely adopted in the semiconductor, LCD (Liquid Crystal Display), PV (Photovoltaic), and LED (Light-Emitting Diode) sectors, fully complying with the rigorous high-quality requirements of these industries.
Detailed Specifications：
material Valve: 316L EPBottle Body: 316L (Alternative materials: Titanium, Hastelloy®) with internal Electropolishing (EP). Surface roughness Ra ≤ 0.15 μm. Compatible Chemical Purity ≤99.9999999%（9N） Helium Leak Detection Leak Rate: ≤ 1.0 × 10⁻¹⁰ mbar·L/s Process Media Solid / Silicon-Adsorbed Precursors, Silicon-Based Materials, and High-Purity Organic Compounds Final Inspection Items Pressure Resistance, Helium Leak Tightness, Moisture Content, Oxygen Content, Particle Count, Surface Roughness (Ra), Metallic Ion Extractables Available Manufacturing Certifications UN Pressure Vessels and ASME UM / U Stamp Certifications Capacity & Dimensions We supply containers in over 200 standard sizes, ranging from 25 mL to 26 m³. Optional Configurations Connection Type, Number of Valves, and Output & Purge Processes
Product Inquiry
Attention: Please leave your email address, and our professionals will contact you as soon as possible!
Contact Us
E-mail: sales02@js-ask.com
Fax: +86-519-85611132
Address: 3rd Floor, Office Area, No. 109, Liuyanghe Road, Xinbei District, Changzhou City
Copyright © 2026 Aisengke (Jiangsu) Chemical Technology Co., Ltd. ALL Rights Reserve